环境量测及改善解决方案：
   Spicer Consulting
   HERZ Co., Ltd.
TEM 样品制备离子减薄机：
   TECHNOORG LINDA
扫描式电子显微镜SEM周边：
   K.E.Development
镀金及镀碳机及冷冻样品控温平台：
   Quorum Technology
奈米图像产生控制系统NPGS
WET-SEM Technology
主动式交流磁场消除器：
SC20FAST Magnetic Field Cancelling System   

  • Cancels the high frequency (9kHz typ.) magnetic field from robotic wafer transports in 300mm wafer fabs.

  • Enables electron beam tools to meet full specification in the vicinity of overhead wafer transport robots
  • 12 x field reduction at 9kHz
    • >20 x field reduction from 25 Hz- 6 kHz with AC sensor
    >50 x field reduction from DC - 1 kHz with added DC sensor
  • Adapts to field changes within 10 μs
  • Full 3 axis (X, Y, Z) system
    • >20 mG (2.0 μT) pk-pk cancelling range
  • Simple “set and forget” operation
  • Cancels and monitors the field
  • Network monitoring option available
  • Supports multiple sensors for TEMs
 
Overview

  • The SC20FAST is a new version of our established SC20 field cancelling system that has been optimised to cancel the high frequency fields, typically at 9kHz, from robotic wafer transports in 300mm wafer fabs. These fields limit the performance of electron beam tools in the fab and are a barrier to achieving the next semiconductor device CD node.

  • The principle of operation of the SC20FAST is similar to our other field cancelling systems, as on our website： www.spicerconsulting.com

  • The field cancelling cables are installed in the EBeam Tool enclosure (Figs. 1 & 2) or on a frame (Fig. 8) around un-enclosed tools.

  • The SC20FAST uses our new, 25Hz - 200kHz bandwidth AC field sensor (Fig. 4). The control unit has faster output amplifiers and retuned filters in the feedback loop. An SC20/DCMR sensor (Fig. 5) can be added if DC field cancelling is also required.